Process data

Standardized processes

Base Piranha clean

ZEP520 - (semi)conductive substrates

ZEP520 - non-conductive substrates

more to follow soon...

Datasheets

HSQ (FOx / XR-1541 - Dow Corning)

LOR lift off resist (Microchem)

HMDS primer (MCC Primer - Microchem)

Ma-N 240x (Microresist)

PGMI lift off resist (Microchem)

PMMA (Microchem)

S1813 (Shipley-->Rohm & Haas)

SU-8 2000 5-15 (Microchem)

SU-8 2000 25-75 (Microchem)