Dualbeam FIB / SEM

This SEM / FIB combines a scanning microscope (SEM) and focused ion beam (FIB) with gas chemistries.

Specifications:

SEM; Schottky Field Emission Gun, SFEG Resolution 0.9 nm at 15 kV Accelerating voltage 350 V – 30 kV Maximum beam current 22 nA	FIB; Sidewinder ion column Ga liguid metal ion source, Ga LMIS Resolution 5 nm at 30 kV Accelarating voltage 0.5 – 30 kV Beam current 1.5 pA – 20 nA
Gas chemistry EBID/IBID; Platinum deposition Gold deposition Insulator enhanced etch (XeF₂) Insulator deposition II (TEOS)	Charge neutralizer Fast beam blanker Sample load lock RF plasma cleaning system EvactronMax. sample size 80 mm diameter with full travel