1. Critical point dryer
Autosamdri

6. Surface profiler
KLA-Tencor alpha-step 500

2. Optical microscope
Zeiss Axioskop2 mat

7. UV lithograpy system
Suss MJB3 Mask aligner

3. Spin coater
Suss Delta 80 Spin coater

8. 3D direct laser writing lithography
Nanoscribe

4. e-Beam lithography system
Raith e-LiNE

9. RIE/ICP Plasma etcher
Oxford Plasmalab 80+

5. Sputtercoater
Emitech 575DX

10. Wet benches
Organic and anorganic wet bench

11. High speed saw
DISCO DAC-2SP/86

12. Dualbeam FIB / SEM
FEI Helios nanolab

14. Atomic Force Microscopy (AFM)
Veeco Dimension 3100 AFM

13. Scanning Electron Microscope
FEI XL30 SEM

15. e-beam PVD system
Kameleon (Homebuilt)

17. Tube vacuum furnace
(Homebuilt)

16. Vacuum coating system
Nanoontje (Homebuilt)