Introduction

The Amsterdam nanoCenter is a facility for nanofabrication and nanocharacterization. It includes a ISO class 5 cleanroom with facilities for optical- and electron beam lithography and plasma etching, a facility for thin film deposition, and innovative optical tools for nanofabrication, manipulation and analysis that include optical tweezers, confocal microscopy, and near-field optical microscopy.

Founded in 2003, in a joint-venture of the FOM-Institute for Atomic and Molecular Physics (AMOLF), the University of Amsterdam (UVA) and the Free University of Amsterdam(VU), it aims to provide state-of-the art opportunities in nano research, primarily for the scientific community within the greater Amsterdam area.

Equipment

Researchers have access to a wide range of fabrication and inspection techniques in cleanroom environments, such as: Electron Beam Lithography, NUV lithography, two-photon lithography, FIB milling/deposition, EBID, reactive ion etching, thin film deposition, rapid thermal annealing, FE-SEM, EDX, Cathode luminescence, AFM, STM, MFM, NSOM, surface profiling, spectroscopic ellipsometry, confocal and optical microscopy.

For more info contact:

Chris Retif - retif@amolf.nl